End effector with slides for transferring trays

ABSTRACT

An end effector for transferring a tray is described. The end effector includes an end effector base attached to a vertical drive column of a tray engine. The end effector further includes a slide having multiple arms that are attached to the end effector base to support the tray, when present. The arms of the slide enable the tray to slide along a length of the end effector base. The arms face each other and extend along the length of the end effector base.

CLAIM OF PRIORITY

This application is a divisional of and claims the benefit of andpriority, under 35 U.S.C. § 120, to U.S. patent application Ser. No.15/386,799, filed on Dec. 21, 2016 and titled “Wafer Tray Sorter WithDoor Coupled To Detector”, which is a divisional of and claims thebenefit of and priority, under 35 U.S.C. § 120, to U.S. patentapplication Ser. No. 13/830,692, filed on Mar. 14, 2013 and titled “TrayEngine With Slide Attached to an End Effector Base”, now issued as U.S.Pat. No. 9,545,724, both of which are incorporated by reference hereinin their entirety.

BACKGROUND

Trays are used to transport a number of devices and materials infabrication facilities. For example, trays are used to transport adeoxyribonucleic acid (DNA) sample, a semiconductor wafer die, apharmaceutical drug, etc. The trays may be transported within a buildingor across buildings.

Sometimes the trays are placed in tray stack supports to protect thetrays from falling during transportation. Multiple such tray stacksupports are used to transport the trays. Also, the trays aretransferred between tray stack supports. For example, a tray stacksupport may be designated to be sent to an entity A and another traystack support may be designated to be sent to an entity B. A tray thatincludes wafer die having specifications provided by the entity A is tobe transferred in the tray stack support from a tray stack support tothe tray stack support designated to be sent to entity A. Similarly, atray that includes wafer die for the entity B is to be transferred inthe tray stack support designated for the entity B.

However, such transfer of trays between tray stacks to send the trays totray stacks designated for particular entities may not be available.

SUMMARY

In some embodiments, a sorter is provided to transfer trays between acassette and an indexer. The sorter includes a tray engine that furtherincludes a vertical drive mechanism. The vertical drive mechanism isrotatable using a motor. Also, the vertical drive mechanism is connectedto an end effector. The end effector includes a grip assembly to grip atray and to transfer the tray between the cassette and the indexer. Thevertical drive mechanism is rotated to rotate the end effector to facethe cassette or the indexer. For example, when a tray is to be retrievedor delivered to the indexer, the end effector is rotated to face theindexer and when a tray is to be retrieved or delivered to the cassette,the end effector is rotated to face the cassette. The grip assembly islinearly moved in a horizontal direction to grip a tray from thecassette or the indexer or to deliver the tray to the cassette or to theindexer.

In various embodiments, information identifying a tray is read when atray is transferred between the indexer and the sorter or between thecassette and the sorter. The identification of information and thesorter allows sequencing, characterization, and sorting of trays fortransfer of the tray to a cassette designated to be sent to a desiredentity.

In various embodiments, a sorter for transferring trays is described.The sorter includes a load port side for loading or unloading a trayfrom a cassette, an indexer side for loading or unloading a tray from anindexer, and a tray engine for transferring a tray, when present,between the load port side and the indexer side. The indexer side andthe load port side are located on opposite sides of the tray engine. Thetray engine includes a rotation mechanism, a vertical drive columnattached to the rotation mechanism, and an end effector attached tovertical drive column. The end effector includes an end effector baseand a slide attached to the end effector base. The end effector furtherincludes a linear drive mechanism coupled to the end effector base and agrip assembly attached to the linear drive mechanism. The linear drivemechanism is used for moving horizontally along the slide to move thegrip assembly in a horizontal direction. The grip assembly moves in thehorizontal direction to load or unload one or more trays, when present,at the load port side or at the indexer side.

In some embodiments, a tray engine is described. The tray engine may bepart of the sorter, a tool, or an equipment front end module (EFEM). Thetray engine includes a vertical drive column, a rotation mechanism forrotating the vertical drive column, and an end effector attached to thevertical drive column. The end effector includes an end effector baseattached to the vertical drive column. The end effector further includesa slide attached to the end effector base to support a tray, whenpresent. The slide enables the tray to slide along a length of the endeffector base. The tray engine includes a drive mechanism attached tothe end effector base for moving along the length of the end effectorbase to enable the tray, when present, to slide linearly along thelength and load or unload the tray to or from the slide.

An end effector for transferring trays is described. The end effectormay be a part of the tray engine. The end effector includes an endeffector base, a slide base located within the end effector base, alinear drive mechanism slidable with respect to the end effector basevia the slide base, and a slide attached to the end effector base tosupport a tray, when present. The linear drive mechanism is configuredto move the tray on the slide.

Other aspects will become apparent from the following detaileddescription, taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a diagram of a sorter for transferring a tray between acassette and an indexer, in accordance with various embodimentsdescribed in the present disclosure.

FIG. 1B is a top view of the sorter, in accordance with some embodimentsdescribed in the present disclosure.

FIG. 1C is a diagram of a sorter having one slide for transferring atray between a cassette and an indexer, in accordance with severalembodiments described in the present disclosure.

FIG. 2 is a top view of the sorter used to transfer trays betweenmultiple cassettes and multiple indexers, in accordance with someembodiments described in the present disclosure.

FIG. 3 is a top view of a system for identifying location of trayswithin a fabrication laboratory, in accordance with various embodimentsdescribed in the present disclosure.

FIG. 4A is an isometric view of a side of an equipment front end module(EFEM), in accordance with several embodiments described in the presentdisclosure.

FIG. 4B is an isometric view of another side of the EFEM, in accordancewith some embodiments described in the present disclosure.

FIG. 4C is an isometric view of a side of the EFEM, in accordance withvarious embodiments described in the present disclosure.

FIG. 5A is an isometric view of a tray engine of the sorter, inaccordance with some embodiments described in the present disclosure.

FIG. 5B is an isometric view of the tray engine, in accordance withvarious embodiments described in the present disclosure.

FIG. 6A is an isometric view of a portion of the EFEM to illustrate useof cameras and sensors to obtain information regarding a tray, inaccordance with various embodiments described in the present disclosure.

FIG. 6B is a diagram of a load port side of the EFEM to illustratedifferent types of information identifying marks that are used toidentify a tray, in accordance with some embodiments described in thepresent disclosure.

FIG. 6C is an isometric view of a portion of the EFEM to illustrate ause the cameras and sensors, in accordance with various embodimentsdescribed in the present disclosure.

FIG. 6D is an isometric view of a portion of the EFEM to illustrate ause the cameras and sensors, in accordance with various embodimentsdescribed in the present disclosure.

FIG. 7A is a view of an indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withseveral embodiments described in the present disclosure.

FIG. 7B is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withsome embodiments described in the present disclosure.

FIG. 7C is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withvarious embodiments described in the present disclosure.

FIG. 7D is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withseveral embodiments described in the present disclosure.

FIG. 7E is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withsome embodiments described in the present disclosure.

FIG. 7F is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withvarious embodiments described in the present disclosure.

FIG. 7G is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withseveral embodiments described in the present disclosure.

FIG. 7H is a view of the indexer side of the EFEM to illustrate atransfer of trays between the EFEM and the indexer, in accordance withvarious embodiments described in the present disclosure.

FIG. 8A is a view of a grip assembly that is a portion of an endeffector located within the sorter, in accordance with variousembodiments described in the present disclosure.

FIG. 8B is a view of the grip assembly of FIG. 8A, in accordance withsome embodiments described in the present disclosure.

FIG. 8C is a view of the grip assembly of FIG. 8A, in accordance withseveral embodiments described in the present disclosure.

FIG. 8D-1 is a side view of an embodiment of a portion of the gripassembly of FIG. 8A when a twist connector is at a position POS1 to gripa tray or after a recent release of the tray, in accordance with variousembodiments described in the present disclosure.

FIG. 8D-2 is another side view of an embodiment of the portion of thegrip assembly of FIG. 8A when the twist connector is at the positionPOS1, in accordance with some embodiments described in the presentdisclosure.

FIG. 8D-3 is a side view of an embodiment of the portion of the gripassembly of FIG. 8A when the twist connector is at a position POS2 andhas gripped a tray, in accordance with several embodiments described inthe present disclosure.

FIG. 8D-4 is a side view of an embodiment of the portion of the gripassembly of FIG. 8A when the twist connector is at a position POS3 andhas missed gripping a tray, in accordance with some embodimentsdescribed in the present disclosure.

FIG. 8E is a view of the grip assembly of FIG. 8A, in accordance withvarious embodiments described in the present disclosure.

FIG. 8F is a view of the grip assembly of FIG. 8A, in accordance withseveral embodiments described in the present disclosure.

FIG. 8G is a view of the grip assembly of FIG. 8A, in accordance withseveral embodiments described in the present disclosure.

FIG. 8H is a view of the grip assembly of FIG. 8A, in accordance withvarious embodiments described in the present disclosure.

FIG. 9A is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and a storage device, in accordance with someembodiments described in the present disclosure.

FIG. 9B is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and the storage device, in accordance withvarious embodiments described in the present disclosure.

FIG. 9C is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and the storage device, in accordance withseveral embodiments described in the present disclosure.

FIG. 9D is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and the storage device, in accordance withvarious embodiments described in the present disclosure.

FIG. 9E is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and the storage device, in accordance with someembodiments described in the present disclosure.

FIG. 9F is a view to illustrate a transfer of trays between the gripassembly of FIGS. 8A-8H and the storage device, in accordance withseveral embodiments described in the present disclosure.

FIG. 10A is a view of a grip assembly that is a part of an end effectorlocated within the sorter, in accordance with various embodimentsdescribed in the present disclosure.

FIG. 10B is a view of the grip assembly of FIG. 10A, in accordance withsome embodiments described in the present disclosure.

FIG. 10C is a view of the grip assembly of FIG. 10A, in accordance withvarious embodiments described in the present disclosure.

FIG. 10D is a view of the grip assembly of FIG. 10A, in accordance withseveral embodiments described in the present disclosure.

FIG. 10E is a view of the grip assembly of FIG. 10A, in accordance withvarious embodiments described in the present disclosure.

FIG. 10F is a view of the grip assembly of FIG. 10A, in accordance withseveral embodiments described in the present disclosure.

FIG. 10G is a view of the grip assembly of FIG. 10A, in accordance withvarious embodiments described in the present disclosure.

FIG. 11A is a view to illustrate a transfer of trays between the gripassembly of FIGS. 10A-10G and a storage device, in accordance withseveral embodiments described in the present disclosure.

FIG. 11B is a view to illustrate a transfer of trays between the gripassembly of FIGS. 10A-10G and the storage device of FIG. 11A, inaccordance with some embodiments described in the present disclosure.

FIG. 11C is a view to illustrate a transfer of trays between the gripassembly of FIGS. 10A-10G and the storage device of FIG. 11A, inaccordance with several embodiments described in the present disclosure.

FIG. 11D is a view to illustrate a transfer of trays between the gripassembly of FIGS. 10A-10G and the storage device of FIG. 11A, inaccordance with various embodiments described in the present disclosure.

FIG. 12 is an isometric view of a grip assembly that is a part of an endeffector located within the sorter, in accordance with variousembodiments described in the present disclosure.

FIG. 13 is an isometric view of a grip assembly that is a part of an endeffector located within the sorter, in accordance with some embodimentsdescribed in the present disclosure.

FIG. 14A is an isometric view of a grip assembly, in accordance withvarious embodiments described in the present disclosure.

FIG. 14B is an isometric view of the grip assembly of FIG. 14A when thegrip assembly has gripped a tray, in accordance with several embodimentsdescribed in the present disclosure.

FIG. 14C is an isometric view of the grip assembly of FIG. 14A in aposition in which the grip assembly may have missed gripping a tray, inaccordance with some embodiments described in the present disclosure.

FIG. 14D is an isometric view of a right arm of the grip assembly ofFIG. 14A, in accordance with several embodiments described in thepresent disclosure.

FIG. 14E is an isometric view of the right arm of FIG. 14D, inaccordance with several embodiments described in the present disclosure.

FIG. 14F is a bottom isometric view of an embodiment of a grip body ofthe grip assembly of FIG. 14A in which the grip assembly is about togrip a tray or has just released the tray, in accordance with variousembodiments described in the present disclosure.

FIG. 14G is a bottom isometric view of an embodiment of the grip body ofFIG. 14F in which the grip assembly has gripped a tray, in accordancewith some embodiments described in the present disclosure.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth inorder to provide a thorough understanding of various embodimentsdescribed in the present disclosure. It will be apparent, however, toone skilled in the art that various embodiments described in the presentdisclosure may be practiced without some or all of these specificdetails. In other instances, well known process operations have not beendescribed in detail in order not to unnecessarily obscure severalembodiments described in the present disclosure.

Although various embodiments are described below as transferring traysbetween a cassette and an indexer, in several embodiments, trays may beunloaded from or loaded to a tool, may be unloaded from or loaded to ashelf, may be unloaded from or loaded to a box, may be unloaded from orloaded to a container, may be unloaded from or loaded to a robot, may beunloaded from or loaded to a conveyer belt, may be unloaded from orloaded to an overhead transport vehicle, or a combination thereof, etc.

FIG. 1 is a diagram of an embodiment of a system 100 for transferring atray between a cassette 102 and an indexer 104. The cassette 102 holdsone or more trays, e.g., a tray T, a tray T5, etc., between supports.For example, the tray T2 is supported between supports CS21 and CS22 ofthe cassette 102.

In some embodiments, a tray, e.g., a carrier, etc., stores, withincompartments, or within one single compartment within the tray,semiconductor wafer die. In various embodiments, a tray stores, withincompartments, light emitting diodes (LEDs), pharmaceutical drugs,biological specimens, deoxyribonucleic acid (DNA) samples,microelectromechanical systems (MEMS), etc. In several embodiments, atray does not includes compartments to store wafer die, LEDs,pharmaceutical drugs, biological specimens, DNA samples, MEMS, etc. buta gel is used on a tray to hold the wafer die, LEDs, pharmaceuticaldrugs, biological specimens, DNA samples, MEMS, etc.

In various embodiments, the cassette 102 includes one or more slots. Forexample, the cassette 102 includes two slots and each slot includes rowsof supports that support trays. As another example, the cassette 102includes three or more slots. A slot of the cassette 102 is separatedfrom another slot of the cassette 102 by a wall within the cassette 102.

In some embodiments, each support of the cassette 102 extends along aside of the cassette 102. For example, the support CS21 is substantiallyparallel to and adjacent to a side of the cassette 102 and the supportCS22 is substantially parallel to and adjacent to an opposite side ofthe cassette 102. The opposite side faces the side that is adjacent tothe support CS21.

In some embodiments, two devices are substantially parallel to eachother when an angle between the two devices ranges between −1 degreesand +1 degrees. In various embodiments, two devices are substantiallyparallel to each other when an angle between the two devices rangesbetween −2 degrees and +2 degrees.

In various embodiments, supports that support a tray are locatedparallel to each other. For example, the support CS21 is parallel to thesupport CS22.

In several embodiments, the supports of the cassette 102 that aresubstantially parallel to each other form a level within the cassette102. For example, the supports CS21 and CS22 form a level.

In several embodiments, the cassette 102 lacks one or more covers, e.g.,a front cover, a top cover, etc. A cover provides access to an inside ofthe cassette 102. One or more trays are supported within an inner regionof the cassette 102. In various embodiments, the cassette 102 is not aclosed container that is closed on all sides and may be accessed via adoor on a front side.

The system 100 includes a sorter 106 that receives one or more traysfrom the cassette 102 that is placed on a shelf 107 of the sorter 106.The shelf 107 is located at a load port side of the sorter 106. Inseveral embodiments, the sorter 106 simultaneously receives multipletrays from the cassette 102.

The sorter 106 includes a tray engine 108 that is fixed to a base 110 ofthe sorter 106. In one embodiment, as shown in FIG. 1B, the tray engine108 is moveable along a track. The tray engine 108 includes a theta (θ)motor 112 that is connected to a vertical drive column 114 via aconnecting mechanism, e.g., gears, belts, etc. The theta motor 112operates to rotate the vertical drive column 114 by the angle θ. Forexample, the theta motor 112 rotates the vertical drive column 114 by anangle between zero and 360 degrees. The theta motor 112 is an example ofa rotation mechanism.

In several embodiments, a motor may be a stepper motor or a continuousmotor.

In some embodiments, when the theta motor 112 rotates the vertical drivecolumn 114 to 180 degrees, an end effector, further described below,faces the load port side and when the theta motor 112 rotates thevertical drive column 114 to 0 degrees, the end effector faces theindexer side.

An end effector 116 is located within the sorter 106 and is connected tothe vertical drive column 114. For example, the end effector 116 isattached to the vertical drive column 114 via an attachment mechanism,e.g., screws, fasteners, etc. The end effector 116 includes an endeffector base 118 that is fixed substantially perpendicularly to thevertical drive column 114. For example, the end effector 118 is attachedto the vertical drive column 114 via an attachment mechanism, examplesof which are provided above. The end effector 116 further includes anupper slide 120 that supports and slides a tray. The end effector 116also include a lower slide 122 that supports and slides a tray.

In various embodiments, two devices are substantially perpendicular toeach other when an angle between the two devices range between 89degrees and 91 degrees. In several embodiments, two devices aresubstantially perpendicular to each other when an angle between the twodevices range between 88 degrees and 92 degrees.

In some embodiments, the slides 120 and 122 are made of a low frictionmaterial, e.g., metals, alloys of metals, etc.

In various embodiments, instead of the slides 120 and 122, a belt isused as a support surface for trays. The belt is driven by a motor toslide a tray supported on the belt. Moreover, motion of the belt isco-ordinated with motion of a grip assembly, which is further describedbelow. For example, motion of the belt is co-ordinated with engagingand/or locking a tray. The engagement and locking are performed by thegrip assembly and are further explained below.

In the embodiments in which the belt is used as the support surface, agripper is used to grip a tray from the cassette 102 or the indexer 104to the belt. In several embodiments, a top surface of the belt isattached to the gripper.

Both the slides 120 and 122 are located substantially parallel to theend effector base 118. For example, the slides 120 and 122 form an anglebetween −1 degrees and 1 degree with respect to the end effector base118. Example of each slide 120 and 122 includes a rail, a track, etc.

In some embodiments, the upper slide 120 is located vertically above thelower slide 122.

The slides 120 and 122 are attached to the end effector base 118 via anattachment mechanism.

The end effector 116 moves vertically up and down with vertical movementof the vertical drive column 114. For example, a vertical drive motor(not shown) is connected to the vertical drive column 114 via aconnecting mechanism to drive the end effector 116 and the verticaldrive column 114 up and down via the connecting mechanism.

In some embodiments, both the slides 120 and 122 simultaneously slidetwo trays along the end effector base 118.

In various embodiments, the end effector 116 includes any other numberof slides to simultaneously slides any other number of trays. Forexample, the end effector 116 includes three or more slides to slidethree or more trays.

The sorter 106 includes a door 124 that allows access to the sorter 106.The door 124 slides down along a side wall W1 of the sorter 106. Thedoor 124 is driven by a door motor (not shown) that is located withinthe base 110 and a connecting mechanism that connects the door 124 tothe door motor.

In some embodiments, the load port side includes the side wall W1 andthe shelf 107.

In various embodiments, the sorter 106 includes any number of doors. Forexample, the sorter 106 includes two to six doors that are located alongthe side wall W1.

In some embodiments, instead of sliding down along the side wall W1, thedoor 124 slides up along the side wall W1. In the embodiments in whichthe door 124 slides up along the side wall W1 instead of down, one ormore cameras are fixed to bottom of the door 124.

A camera CAM1, e.g., a digital camera, an image capture device, aZ-depth camera, etc., is located on top of the door 124. The camera CAM1is fixed to the door 124 via an attachment mechanism, e.g., screws,fasteners, etc.

In various embodiments, any number of cameras are fixed on top of thedoor 124. For example, two or three cameras are attached to the top ofthe door 124.

In some embodiments, instead of a camera that captures images, ascanner, e.g., a barcode scanner, etc., that scans information, e.g., acode, a barcode, etc., located on a tray is used. Examples of a barcodescanner include a laser scanner, a charge-coupled device (CCD) reader,an omni-directional barcode scanner, a camera-based reader, etc.

In several embodiments, instead of a camera, an ultrasonic transducermay be used to capture ultrasonic images of information identifying atray or a tray lid.

In various embodiments, a wave generating and capturing device may be aused instead of a camera for generating waves and capturing images ofinformation identifying a tray or a tray lid.

In various embodiments, instead of a camera that captures an image, aradio frequency (RF) receiver is used to receive RF signals from an RFIDtag that is on a tray to identify the tray. The information within theRF signals is transferred from the RF receiver to a computer system,which is further described below for analysis of the information.

In several embodiments, in addition to one or more cameras, one or moresensors are used to sense presence or absence of a tray in the cassette102. The one or more sensors are fixed on top of the door 124. Examplesof sensors include infrared sensors, optical sensors, air sensors,pneumatic sensors, beam-breaking sensors, retro-reflective opticalsensors, ultrasonic sensors, etc.

In some embodiments, in addition to the sensors and the cameras, heightmeasuring devices, e.g., encoders, decoders, etc., are attached to topor bottom surfaces of the door and are used to measure location, e.g.,levels, etc., along a vertical axis of each tray within the cassette 102or the indexer 104.

In various embodiments, the sensors, the cameras, and/or the heightmeasuring devices are attached to top or bottom surfaces of the slides120 and/or 122 instead of being attached to the door 124. In someembodiments, the sensors, the cameras, and/or the height measuringdevices are attached to grip assemblies, which are further describedbelow, instead of being attached to the door 124.

In several embodiments, the height measuring devices are used with thesensors to determine locations of absence of trays within the cassette102 or the indexer 104.

In several embodiments, the locations measured of each tray or of levelsthat do not include trays is used to adjust a height of the verticaldrive column 114. For example, the computer system receives thelocations measured of each tray or of levels that do not include traysfrom the encoder and decoder and sends a signal to the vertical drivemotor to adjust a height of the slides 120 and 122 to receive trays fromlevels that include trays or to deliver trays to levels that do notinclude trays.

In various embodiments in which the door 124 slides up along the sidewall W1 instead of down, instead of being fixed on top of the door 124,the one or more sensors and/or the height measuring devices are fixed tobottom of the door 124.

The sorter 106 has a side wall W2 that is located opposite to the sidewall W1. For example, the side walls W1 and W2 are located on oppositesides of the sorter 106. The side wall W2 includes a slot S1 forallowing passage of a tray.

In several embodiments, the side wall W2 includes any number of slots,e.g., two, three, fourth, five, etc. Each slot allows passage of anumber, e.g., one, two, three, etc., of trays.

The indexer 104 holds a number of trays, e.g. a tray T1, a tray T3, anda tray T4, etc., between indexer columns. The trays stack on top of eachother between the columns of the indexer 104.

The indexer columns that stack trays within the indexer 104 are locatedsubstantially parallel to each other.

In several embodiments, instead of indexer columns, the indexer 104include substantially parallel supports similar to that of the supportsCS11 and CS12 to support trays within the indexer 104.

The indexer 104 includes an indexer module 128 that is located on anindexer base 130. The indexer module 128 has a bottom surface 109 thatis driven by an indexer motor via a connecting mechanism to move thebottom surface 109 vertically up and down. Any trays supported on thebottom surface 109 of the indexer module 128 move up and down with thebottom surface 109.

The indexer base 130 is placed on a shelf 132 of the sorter 106. Theshelf 132 is located on an indexer side, which is a side located on anopposite side of the load port side.

In various embodiments, the indexer side includes the side wall W2 andthe shelf 132.

The cassette 102 is placed on top of the shelf 107. For example, thecassette 102 is placed by a user on top of the shelf 107. As anotherexample, the cassette 102 is placed on top of the shelf 107 via anautomated mechanism, e.g., automated guided vehicle (AGV), robot arms,etc.

In various embodiments, the cassette 102 is moved close to the door 124.For example, the cassette 102 is moved to be within a pre-determineddistance from the door 124.

The door motor is operated to open the door 124. As the door 124 movesdown, the one or more sensors attached to the door 124 sense whether atray is present between supports CS11 and CS12, then sense whether atray is present between the supports CS21 and CS22, and so on until theone or more sensors sense all levels of supports in the cassette 102.For example, the one or more sensors determine that there is an absenceof a tray between the supports CS11 and CS12 and that there is apresence of the tray T2 between the supports CS21 and CS22. It should benoted that the supports CS11 and CS12 are located at a level above thesupports CS21 and CS22.

The sensors send data identifying levels of the cassette 102 at whichpresence of trays is sensed to the computer system. The computer systemcontrols one or more cameras, e.g., CAM1, CAM2, etc, to capture imagesof information identifying trays at levels at which a presence of thetrays is sensed.

As the door 124 moves down, for the levels within the cassette 102 thatinclude the trays, one or more cameras CAM1, CAM2, etc., attached to thetop of the door 124 capture an image of information identifying thetrays within the cassette 102. For example, the one or more camerasattached to the top of the door 124 take a picture of a code on the trayT2 and then take a picture of a code of the tray T5. In this example,the one or more cameras do not capture an image of a space between thesupports CS11 and CS12 as there is an absence of a tray between thesupports CS11 and CS12.

In the embodiments in which the door 124 moves up instead of down, asthe door 124 moves up, the one or more sensors at the bottom of the door124 sense the presence or absence of trays within the cassette 102 andthe one or more cameras at the bottom of the door 124 take an image ofinformation on the trays for the levels that support the trays. Forexample, the one or more sensors sense presence of the tray T5 and thensense presence of the tray T2. As another example, the one or morecameras take a picture of information on the tray T5 and then take apicture of information on the tray T2.

The theta motor 112 operates to rotate the vertical drive column 114 atan angle theta to position the end effector 116 to extend substantiallyparallel to the supports of the cassette 102 at a level. For example,the theta motor 112 operates to rotate the vertical drive column 114 sothat edges of the slides 120 and 122 face the side wall W1. As anotherexample, the theta motor 112 operates to rotate the vertical drivecolumn 114 so that the slides 120 and 122 are substantiallyperpendicular to the side wall W1.

The vertical drive motor operates to adjust a level of the end effector116 vertically up or down to facilitate obtaining one or more trays fromthe cassette 102. For example, a level of the upper slide 120 isadjusted to substantially match a level of the tray supports CS21 andCS22 that support the tray T2 and a level of the lower slide 122 isadjusted to substantially match a level of the supports CS31 and CS32 ofthe cassette 102. The supports CS31 and CS32 lay at a level below thetray supports CS21 and CS22.

In some embodiments, a distance between the upper slide 120 and thelower slide 122 extends across one or more levels of the cassette 102.For example, a distance between the upper slide 120 and the lower slide122 spans across three levels of the cassette 102. As another example, adistance between the upper slide 120 and the lower slide 122 is equal toone level of the cassette 102.

Grip assemblies of the end effector 116 extend substantiallyhorizontally with the sliding of driving plates of the end effector 116along the slides 120 and 122 to come close to and grip one or more edgesof one or more trays within the cassette 102. For example, a gripassembly of the end effector 116 is extended horizontally when an upperdriving plate of the end effector 116 slides along the upper slide 120to facilitate gripping an edge E2 of the tray T2. The grip assembliesand the driving plates are further described below.

The driving plates and grip assemblies retract to slide a tray fromsupports at a level within the cassette 102 to a slide of the endeffector 116. For example, an upper grip assembly retracts withretraction of the upper driving plate at a level of the upper slide 120to slide the tray T2 from the supports CS21 and CS22 to bring the trayT2 between arms of the upper slide 120. Moreover, when another tray ispresent between the supports CS31 and CS32, a lower driving plate at alevel of the lower slide 122 retracts to slide the tray from thesupports CS31 and CS32 to bring the tray between arms of the lower slide122.

In some embodiments, the trays may be extracted from the cassette 102 orfrom the indexer 104 to process, e.g., test, assemble, clean, etc.,wafer die within the trays.

In several embodiments, both the upper and lower driving platessimultaneously retract to retrieve trays from the levels of the supportsCS21 and CS22 and supports CS31 and CS32 to bring the trays between armsof the upper slide 120 and the lower slide 122.

The theta motor 112 rotates by the angle theta to rotate the endeffector 116 towards the side wall W2 from the side wall W1. When theend effector 116 is rotated to face the side wall W2, edges of the endeffector 116 face the side wall W2. The vertical drive motor moves theend effector 116 and the vertical drive column 114 up or down toposition the slides 120 and 122 between levels of upper and lower edgesof the slot S1.

The indexer 104 is placed close to the slot S1 to facilitate placementof a tray via the slot S1 into the indexer 104. The indexer motor alsomoves the indexer 104 up or down to level trays within the indexer 104to position the indexer 104 to facilitate reception of one or more traysfrom the end effector 116. For example, a level of a tray within theindexer 104 is controlled with the indexer motor to place another trayon top of the tray level or to remove the tray at the level from theindexer 104.

The grip assembly of the end effector 116 extends through the slot S1into the indexer 104 to slide the tray T2 that is received from thecassette 102 at a level within the indexer 104. The tray T2 slides ontoanother tray within the indexer 104 or on top of a bottom surface 109 ofthe indexer 104.

In various embodiments, the grip assemblies of the slides 120 and 122extend through the slot S1 into the indexer 104 to simultaneously slidetwo trays at two levels within the indexer 104 on top of a tray withinthe indexer 104 or on top of the bottom surface 109 of the indexer 104.

In some embodiments, instead of delivering a tray from the cassette 102via the sorter 106 to the indexer 104, a tray is delivered from theindexer 104 and sent to the cassette 102 via the sorter 106. Forexample, with the extension of the upper driving plate, the gripassembly of the end effector 116 extends via the slot S1 into theindexer 104 and grips a tray located within the indexer 104. With theretraction of the upper driving plate, the grip assembly then retractsto slide the tray that may be located on top of another tray within theindexer 104 or on top of the bottom surface 109 of the indexer 104 fromthe indexer 104 to the arms of the upper slide 120. The theta motorrotates to allow the edges of the end effector 116 to face an opening inthe side wall W1 formed by opening the door 124. The opening in the sidewall W1 is created when the door 124 moves up or down. Also, the endeffector motor moves the end effector 116 vertically up or down toposition the end effector 116 to facilitate delivery of the tray to thecassette 102. The grip assembly of the end effector 116 extends via theopening in the side wall W1 to deliver a tray from the arms of the upperslide 120 to supports at a level within the cassette 102.

In various embodiments, the cassette 102 lacks supports to supporttrays. In these embodiments, the cassette 102 includes a base thatsupports a bottom tray within the cassette 102 and any other trays aresupported on the bottom tray and the base.

FIG. 1B is a top view of the system 100 of FIG. 1A. In the FIG. 1B, twoslots SO1 and SO2 are visible. The slots SO1 and SO2 are locatedadjacent to each other and are separate from each other by a common wall138. As shown, the support CS11 extends along a cassette wall CW1 andthe support CS12 extends along the common wall 138.

Also, as shown, the cassette 102 lacks a front door that provides accessto the sorter 106 of the trays within the cassette 102.

The sensors SE1 and SE2 are attached to a top surface 140 of the door124. The cameras CAM1 and CAM2 are also attached to the top surface 140.The sensor SE1 senses whether a tray is located within the slot SO1 andthe sensor SE2 senses whether a tray is located within the slot SO2.

Similarly, when the sensor SE1 determines that a tray is present at alevel within the slot SO1, the camera CAM1 captures an image ofinformation on the tray. On the other hand, when the sensors SE1determines that a tray is absent at a level within the slot S01, thecamera CAM1 does not capture an image at the level. Moreover, when thesensor SE2 determines that a tray is present at a level within the slotSO2, the camera CAM2 captures an image of information on the tray. Onthe other hand, when the sensor SE2 determines that a tray is absent ata level within the slot SO2, the camera CAM2 does not capture an imageat the level.

The vertical drive column 114 moves along a rail 142 to move the endeffector 116 (FIG. 1) along the rail 142 in a direction that issubstantially parallel to the side walls W1 and W2. The vertical drivecolumn 114 is driven along the rail 142 by a column motor (not shown).The column motor drives the vertical drive column 114 along the rail 142via a connecting mechanism. The movement of vertical drive column 114along the rail 142 allows the end effector 116 to retrieve trays viaopenings created by opening multiple doors at the side wall W1 of thesorter 116 and also deliver trays via multiple slots in the side wall W2of the sorter 116.

The end effector 116 includes a top driving plate 144 and a bottomdriving plate 146. The top driving plate 144 slides along the upperslide 120 (FIG. 1) to slide a tray supported between the arms of theupper slide 120. In some embodiments, a tray and the driving plates 144and 146 slide along a length “1” of the end effector base 118 to slidein a linear direction.

Moreover, the end effector 116 includes a bottom driving plate 146 thatis located below the top driving plate 144. The bottom driving plate 146slides along the bottom slide 122 (FIG. 1) to slide a tray supportedbetween the arms of the lower slide 122.

The indexer 104 includes multiple indexer columns IC1 thru IC4, e.g.,bars, rods, etc., that extend vertically to stack trays within theindexer 104.

FIG. 1C is a diagram of an embodiment of a system 115 for transferring atray between the cassette 102 and the indexer 104. The system 115includes a sorter 117, which is similar to the sorter 106 (FIG. 1A)except that the sorter 117 includes an end effector 119 instead of theend effector 116 (FIG. 1A). The end effector 119 includes the upperslide 120 and lacks the lower slide 122 (FIG. 1A). The end effector 119functions in a similar manner as that of the end effector 116. Forexample, the upper slide 120 is used to load or unload trays between thecassette 102 and the indexer 104.

It should be noted that in some embodiments, any number of slides forsimultaneously transferring any number of trays may be used.

FIG. 2 is a top view of an embodiment of the sorter 106. Four cassettesC1 thru C4 are placed on top of the shelf 107 and four indexers I1 thruI4 are placed on top of the shelf 132. Each cassette C1 thru C4 holdsone or more trays and each indexer I1 thru I4 also holds one or moretrays.

In several embodiments, one or more of the cassettes C1 thru C4 does nothold a tray and one or more of the indexers I1 thru I4 does not hold atray.

The vertical driving column 114 (FIG. 1B) is driven by the column motorto be located at a position PO1, a position PO2, a position PO3, or aposition PO4. The position PO1 is horizontally aligned with respect tothe slot S1, the position PO2 is horizontally aligned with respect to aslot S2 within the side wall W2, the position PO3 is horizontallyaligned with respect to a slot S3 within the side wall W2, and theposition PO4 is horizontally aligned with respect to a slot S4 withinthe side wall W4.

Moreover, the position PO1 is horizontally aligned with respect to anopening O1 in the side wall W1, the position PO2 is horizontally alignedwith respect to an opening O2 in the side wall W1, the position PO3 ishorizontally aligned with respect to an opening O3 in the side wall W1,and the position PO4 is horizontally aligned with respect to an openingO4 in the side wall W1. The openings O1 thru O4 are created when doorsof the sorter 106 open. For example, the opening O1 is formed when thedoor 124 (FIG. 1A) opens.

A tray can be transferred from the cassette C1 to any of the indexers I1thru I4. For example, the vertical drive column 114 (FIG. 1B) is movedto the position PO1 to retrieve a tray from the cassette C1 and thenmoved from the position PO1 via the positions PO2 and PO3 to theposition PO4 to deliver the tray to the indexer I4. In a number ofembodiments, a tray can be transferred from the cassette C2 to any ofthe indexers I1 thru I4. For example, the vertical drive column 114(FIG. 1B) is moved to the position PO2 to retrieve a tray from thecassette C2 and then moved from the position PO2 via the position PO3 tothe position PO4 to deliver the tray to the indexer I4. In someembodiments, a tray can be transferred from the cassette C3 to any ofthe indexers I1 thru I4. In several embodiments, a tray can betransferred from the cassette C4 to any of the indexers I1 thru I4.

In some embodiments, a tray is transferred from the cassette C1 to anyof the other cassettes C2 thru C4 by using one or more of the positionsPO1 thru PO4. In several embodiments, a tray is transferred from thecassette C2 to any of the other cassettes C1, C3, and C4 by using one ormore of the positions PO1 thru PO4. In various embodiments, a tray istransferred from the cassette C3 to any of the other cassettes C1, C2,and C4 by using one or more of the positions PO1 thru PO4. In severalembodiments, a tray is transferred from the cassette C4 to any of theother cassettes C1, C2, and C3 by using one or more of the positions PO1thru PO4.

Similarly, a tray is transferred from any of the indexers I1 thru I4 toany of the cassettes C1 thru C4. For example, the vertical drive column114 (FIG. 1B) is moved to the position PO1 to retrieve a tray from theindexer I1 and then moved from the position PO1 via the positions PO2and PO3 to the position PO4 to deliver the tray to the cassette C4. Asanother example, a tray is transferred from the indexer I2 to any of thecassettes C1 thru C4. As another example, a tray is transferred from theindexer I3 to any of the cassettes C1 thru C4. In several embodiments, atray is transferred from the indexer I4 to any of the cassettes C1 thruC4.

In various embodiments, a tray is transferred from the indexer I1 to anyof the other indexers I2 thru I4 by using one or more of the positionsPO1 thru PO4. In various embodiments, a tray is transferred from theindexer I2 to any of the other indexers I1, I3, and I4 by using one ormore of the positions PO1 thru PO4. In various embodiments, a tray istransferred from the indexer I3 to any of the other indexers I1, I2, andI4 by using one or more of the positions PO1 thru PO4. In severalembodiments, a tray is transferred from the indexer I4 to any of theother indexers I1, I2, and I3 by using one or more of the positions PO1thru PO4.

FIG. 3 is a top view of an embodiment of a system 148 for identifyinglocation of trays within a fabrication laboratory (fab) 150. The fab 150includes multiple sorters and multiple tools, e.g., metrology tools,production tools, tools for processing wafers, tools for processingpharmaceutical drugs, tools for processing DNA samples, tools forprocessing light emitting diodes, tools for processing MEMS devices,etc. For example, the fab 150 includes a tool to clean a wafer die, atool to retrieve a die from a tray, a tool to place a die into acompartment of a tray, a tool to clean a light emitting diode, etc.

The cameras, e.g., the cameras CAM1, CAM2 (FIG. 1B), etc., that areattached to doors of the sorter 106 (FIG. 2) capture images and transferthe images to a computer system 152. The computer system 152 includesone or more processors and one or more storage devices, which arecomputer-readable media. Examples of the computer system 152 include adesktop, a laptop, a workstation, etc.

As used herein, a processor may be an application specific integratedcircuit (ASIC), a programmable logic device (PLD), a central processingunit (CPU), a microprocessor, etc.

Moreover, examples of a storage device include a read-only memory (ROM),a random access memory (RAM), or a combination thereof. For example, astorage device includes a flash memory, a redundant disk array, a harddisk, etc.

Cassettes and/or indexers are transferred between the sorters of the fab150. In various embodiments, cassettes and/or indexers are transferredbetween the tools of the fab 150. In several embodiments, cassettesand/or indexers are transferred between the tools of the fab 150 and thesorters of the fab 150.

Identification of cassettes that are located within the fab 150 and thatused to transfer trays within the fab 150 is stored in the storagedevice. For example, a code identifying a cassette and distinguishingthe cassette within the fab 150 from another cassette within the fab 150is stored in the storage device.

Moreover, identification of indexers that are located within the fab 150and used to transfer trays within the fab 150 is stored in the storagedevice. For example, a code identifying an indexer and distinguishingthe indexer within the fab 150 from another indexer within the fab 150is stored in the storage device.

Also, information identifying the trays used within the fab 150 isstored in the storage device. For example, a barcode identifying a traywithin the fab 150 and distinguishing the tray from another tray usedwithin the fab 150 is stored in the storage device.

Moreover, identification of sorters that are located within the fab 150and used to transfer trays within the fab 150 is stored in the storagedevice. For example, a code identifying a sorter and distinguishing thesorter within the fab 150 from another sorter within the fab 150 isstored in the storage device.

Furthermore, identification of tools that are located within the fab 150and used to process trays within the fab 150 is stored in the storagedevice. For example, a code identifying a tool and distinguishing thetool within the fab 150 from another tool within the fab 150 is storedin the storage device.

Relationships between identification of cassettes and informationidentifying trays used within the fab 150 is also stored in the storagedevice. For example, a relationship indicating that a tray having anidentification code aaaa is stored in a cassette having anidentification code bbbb is stored in the storage device.

Moreover, relationships between identification of indexers andinformation identifying trays used within the fab 150 is also stored inthe storage device. For example, a relationship indicating that a trayhaving the identification code aaaa is stored in an indexer having anidentification code cccc is stored in the storage device.

Relationships between identification of sorters and informationidentifying trays used within the fab 150 is also stored in the storagedevice. For example, a relationship indicating that a tray having theidentification code aaaa is being sorted in a sorter having anidentification code dddd is stored in the storage device.

Moreover, relationships between identification of cameras andinformation identifying doors of sorters on which the cameras arelocated is also stored in the storage device. For example, arelationship indicating that a camera having an identification code eeeeis located on a sorter door having an identification code ffff is storedin the storage device.

Also, relationships between identification of readers and informationidentifying indexers on which the readers are placed is also stored inthe storage device. For example, a relationship indicating that a readerhaving an identification code gggg is located on an indexer having anidentification code hhhh is stored in the storage device. Examples of areader include a scanner, a camera, etc. The readers are furtherdescribed below.

When a tray is transferred from a cassette to the sorter, a camera ofthe sorter captures an image of information identifying the tray fromthe tray and sends the image to the computer system 152. When the imageis received, the processor of the computer system 152 determines thatthe tray identified by the information is no longer stored in thecassette and is transferred from the cassette to a sorter in which thecamera is located.

Similarly, when a tray is transferred from a sorter to an indexer, areader of the indexer reads information identifying the tray and sendsthe information to the computer system 152. Upon receiving theinformation identifying the tray, the processor of the computer system152 determines that the tray is being stored in the indexer.

Information regarding a location of a tray within a sorter, within anindexer, a tool, within a cassette, etc. may be sent from the computersystem 152 via a network 154 to another computer system (not shown).Examples of the network 154 include a local area network, a wide areanetwork, etc. The network 154 and the computer system 152 may be a partof the Internet or an Intranet.

FIG. 4A is an isometric view of an embodiment of a load port side of anequipment front end module (EFEM) 156, which is an example of the sorter106 (FIG. 1A) and of the sorter 117 (FIG. 1C). The EFEM 156 includes anair inlet 158 that allows air to flow into the EFEM 156. The air thatflows into the EFEM 156 is filtered and used to remove contaminationfrom trays and the air is blown to remove the contamination out of theEFEM 156. For example, the air is filtered using ultra-low particulateair (ULPA) filters. In some embodiments, the air that flows into theEFEM 156 is filtered to reduce chances of, e.g., prevent, etc.,contamination of air within the EFEM 156.

As shown, doors of the EFEM 156 are lowered down to form the openingsO1, O2, O3, and O4 in the wall W1. Trays are transferred between one ormore of the cassettes C1 thru C4 and the EFEM 156 via one or more of thecorresponding openings O1 thru O4.

In various embodiments, the EFEM 156 includes temperature and/orhumidity controls. In some embodiments, the EFEM 156 includes provisionof gases, e.g., argon, helium, nitrogen, etc., to protect the die withinthe EFEM 156. In a variety of embodiments, the gases may be employedusing a recirculation approach.

The cassette C4 includes two slots 159 and 160 and is supported on ashelf 162, which is an example of the shelf 107 (FIG. 1A). Similarly,the cassettes C1 thru C3 include two slots and are supported on theshelf 162.

In some embodiments, each cassette C1 thru C4 includes any other numberof slots, e.g., one slot, three slots, etc.

A wall W3 of the EFEM 156 is substantially perpendicular to the wall W1and to the wall W2 (FIG. 1A).

FIG. 4B is an isometric view of an embodiment of an indexer side of theEFEM 156. The indexers I1 thru I4 are supported on a shelf 164, which isan example of the shelf 132 (FIG. 1A).

As shown, trays are stacked on top of the indexer I1. For example, traysare stacked on top of an indexer module IM1, which is located on top ofan indexer base IB1. The stack of trays on top of the indexer I1 issupported by indexer supports IS11, IS12, IS13, and IS14, which is notvisible in FIG. 4B. For example, the indexer supports IS11, IS12, IS13,and IS14 reduce chances of the stack of trays from falling off theindexer module IM1. The indexer supports IS11, IS12, IS13, and IS14 aresupports of the indexer 104.

In some embodiments, the terms indexer columns and indexer supports areused interchangeably herein.

In several embodiments, an indexer may include any other number ofsupports. For example, the indexer I1 includes three, five, or sixsupports to support a stack of trays on top of the indexer module IM1.

A view window 166 is located on a wall W4 of the EFEM 156. The wall W4is substantially parallel to the wall W3 and is substantiallyperpendicular to the wall W1 and to the wall W2 (FIG. 1A). The viewwindow 166 provides a view of the cassette C1 that is supported on theshelf 162.

In some embodiments, the EFEM 156 does not include the view window 166.

FIG. 4C is an isometric view of an EFEM 170 that excludes a shelf on theindexer side. As shown, the four slots S1 thru S4 allow passage of traysbetween the EFEM 170 and indexers I1 thru I4 (FIG. 4B).

FIG. 5A is an isometric view of an embodiment of a system 174 fortransferring trays between the tray engine 108 and the cassette 102. Thevertical drive assembly is fixed to the end effector base 118. A topslider block 176 of the end effector 116 is slidably attached to an edgeof the end effector base 118. For example, the top slider block 176slides with respect to a slide base 188 within the end effector base118. Examples of the slide base 188 include a rail, a track, a base witha slot for sliding, etc. The slide base 188 is located within andattached to the end effector base 118. In some embodiments, the topslider block 176 may be attached to or may include rollers to allow thetop slider block 176 to slide on the slide base 188.

Similarly, a bottom slider block (not visible in FIG. 5A) of the endeffector 116 is slidably attached to an opposite edge of the endeffector base 118 via a bottom slider block (not visible in FIG. 5A).The opposite edge is opposite to an edge of the end effector base 118 atwhich the top slider block 176 is located. In some embodiments, thebottom slider block may be attached to or may include rollers to allowthe bottom slider block to slide on a slide base located on a side ofthe end effector base 118 opposite to a side on which the slide base 188is located.

In some embodiments, the top slider block 176 and the bottom sliderblock slide along the length l of the end effector base 118 to slide ina linear direction.

A top connector block 178 of the end effector 116 is fixed on top of thetop slider block 176 and a bottom connector block (not visible in FIG.5A) of the end effector 116 is attached on top of the bottom sliderblock.

The top driving plate 144 is attached, e.g., via one or more screws,etc., to top of the top connector block 178. Similarly, the bottomdriving plate 146 is attached, e.g., via one or more screws, etc., totop of the bottom connector block. The top driving plate 144 is locatedon top of the bottom driving plate 146.

The top slider block 176, the top connector block 178, and the topdriving plate 144 are examples of a linear drive mechanism and slide ina linear direction. For example, the top slider block 176 and theconnector block 178 slide towards or away from the load port side ortowards or away from the indexer side.

Similarly, the bottom slider block, the bottom connector block, and thebottom driving plate 146 are examples of a linear drive mechanism andslide in a linear direction. For example, the bottom slider block andthe bottom connector block slide towards or away from the load port sideor towards or away from the indexer side.

In some embodiments, instead of using two blocks, e.g., the top sliderblock 176 and the connector block 178, to connect the slide base 188 tothe top driving plate 144, any other number of connector blocks areused. Similarly, instead of using two blocks, e.g., the bottom sliderblock and the bottom connector block to connect the other slide base tothe bottom driving plate 146, any other number of connector blocks areused.

An upper grip assembly 180 is attached to the top driving plate 144 anda lower grip assembly 182 is attached to the bottom driving plate.

In some embodiments, the upper grip assembly 180 is coplanar with theupper slide 120 and the lower grip assembly 182 is coplanar with thelower slide 122.

Multiple slide supports SS1, SS2, SS3, and SS4 are attached on top ofthe end effector base 118. The slide support SS4 is located on anopposite side of the end effector base 118 compared to the side of theend effector base 118 to which the slide supports SS1, SS2, and SS3 areattached. The slides supports SS1 thru SS4 facilitate constrainingmovement of trays moving on the slides 120 and 122 to a linear motion toprevent the trays from falling off the slides 120 and 122.

The slides 120 and 122 are attached to the slide supports SS1, SS2, SS3,and SS4. The slide supports SS1, SS2, SS3, and SS4 provide support totrays that slide between arms A11 and A12 of the upper slide 120 andthat slide between arms A21 and A22 (shown in FIG. 5B) of the lowerslide 122.

Also, attached at a bottom of the end effector base 118 is an endeffector drive motor 184.

The vertical drive column 114 is driven by the vertical drive motor (notshown) that drives the vertical column 114 up and down with respect to abase (not shown) of the tray engine 108. With the movement of thevertical drive column 114, the end effector 116 moves up and downvertically.

When a tray is supported between arms A21 and A22 of the lower slide 122and the tray is to be transferred to the cassette 102, the lower slide122 is vertically positioned at a level of a pair of supports of thecassette 102 and the pair of supports lacks a tray between the supports.Also, when a tray is supported between the arms A11 and A12 of the upperslide 120 and the tray is to be transferred to the cassette 102, theupper slide 120 is vertically positioned at a level of a pair ofsupports of the cassette 102 and the pair lacks a tray between thesupports.

Moreover, when a tray is to be received from the cassette 102, the lowerslide 122 is vertically positioned at a level of a pair of supports ofthe cassette 102 and the pair supports the tray between the supports.Also, when a tray is to be received from the cassette 102, the upperslide 120 is vertically positioned at a level of a pair of supports ofthe cassette 102 and the pair supports the tray between the supports.

Also, the theta motor 112 rotates the end effector 116 with the verticaldrive column 114 to position an edge E11 of the arm A11 and an edge E12of the arm A12 to face the slot SO1 and to position an edge E21 of thearm A21 and an edge E22 of the arm A22 to face the slot SO1.

The top slider block 176 slides along the slide base 188, via a slidemechanism, e.g., rollers, roller balls, etc., within the end effectorbase 118 to slide the top driving plate 144 towards or away from theslot SO1. Similarly, the bottom slider block slides along the slide baseon an opposite side of the end effector base 118 to slide the bottomdriving plate 146 towards or away from the slot SO1.

When the top driving plate 144 moves linearly and horizontally towards alevel within the slot SO1, the upper grip assembly 180 also moveslinearly in a horizontal direction towards the level within the slot SO1to slide a tray supported between the arms A11 and A12 towards the levelwithin the slot SO1. Moreover, when the bottom driving plate 146 moveslinearly and horizontally towards a level within the slot SO1, the lowergrip assembly 182 also moves linearly in a horizontal direction towardsthe level within the slot SO1 to slide a tray supported between the armsA21 and A22 towards the level within the slot SO1.

Similarly, when the top driving plate 144 moves linearly andhorizontally away from a level within the slot SO1, the upper gripassembly 180 also moves linearly and horizontally away from the levelwithin the slot SO1 to slide a tray to be supported between the arms A11and A12 away from the level within the slot SO1. Moreover, when thebottom driving plate 146 moves linearly and horizontally away from alevel within the slot SO1, the lower grip assembly 182 also moveslinearly and horizontally away from the level within the slot SO1 toslide a tray to be supported between the arms A21 and A22 away from thelevel within the slot SO1.

In some embodiments, when a tray slides with respect to the upper slide120, the tray is supported by the supports SS1, SS2, SS3, and SS4 untilthe tray is supported by supports within the cassette 102. Similarly,when a tray slides with respect to the lower slide 122, the tray issupported by the supports SS1, SS2, SS3, and SS4 until the tray issupported by supports within the cassette 102.

It should be noted that the top slider block 176 and the bottom sliderblock are in a retracted position P1.

FIG. 5B is an isometric view of an embodiment of a system 190 thatillustrate use of the tray engine 108 to insert a tray within thecassette 102. As shown, the top driving plate 144 and the bottom drivingplate 146 slide to an extended position P2 from the retracted positionP1. When the plates 144 and 146 are at the extended position P2, theplates 144 and 146 are closer to the edges E11, E12, E21, and E22 (FIG.5A) of the arms A11, A12, A21, and A22 compared to when the plates 144and 146 are at the retracted position P1.

When the plates 144 and 146 are at the extended position P2, the uppergrip assembly 180 and the lower grip assembly 182 are extended towards alevel within the slot SO1 at which a tray is to be placed or from whicha tray is to be retracted.

As shown in a zoom-in window, the edge E11 is tapered to form a slidetaper 131 to facilitate reception of a tray from the indexer 104. Forexample, the edge E11 is curved at the slide taper 131 to allow smoothreception of a tray. When a tray is received via the edge E11, the trayis supported on a slide surface 133 of the upper slide 120.

In several embodiments, the other edges E12, E21, and E22 are alsotapered in a manner similar to that the edge E11.

In some embodiments, the slides 120 and 122 have upper retentionsurfaces in addition to side and lower retention surfaces. For example,in addition to the slide surface 133 and a side surface 135, the slide120 has an upper surface that facilitates retention of a tray orretention of the tray and a tray lid between the upper surface and theslide surface 133. The upper surface may be substantially perpendicularto the side surface 135 and substantially parallel to the slide surface133.

FIG. 6A is an isometric view of an embodiment of a portion 202 of theEFEM 156 (FIG. 4A) to illustrate use of the cameras CAM1 and CAM2 andsensors SE1 and SE2. The portion 202 includes the opening O4.

As shown, the cameras CAM1, CAM2, and the sensors SE1 and SE2 areattached via an attachment mechanism to the top surface 140 of the door124.

When the cassette C1 approaches the door 124, the door 124 is drivendown by the door motor to form the opening O4. Simultaneous with theformation of the opening O4, the sensor SE1 senses whether a tray ispresent or absent at all levels of the slot SO1 and the sensor SE2senses whether a tray is present or absent at all levels of the slotSO2.

In some embodiments, a level of a slot is a horizontal level of twosupports, e.g., supports SU131 and SU132, of the slot.

The sensor SE2 sends an indication that a tray is sensed at a level ofthe slot SO2 to the computer system 152 (FIG. 3). The computer system152 sends a signal to the camera CAM2 to take an image of the tray thatis sensed.

Upon receiving a signal indicating that a tray, e.g., the tray T1, ispresent at a level within the slot SO2, the camera CAM2 takes an imageof information identifying the tray. The camera CAM2 sends the image tothe computer system 152 for storage and further execution.

FIG. 6B is a diagram of an embodiment of the load port side toillustrate different types of information identifying marks that areused to identify a tray. As shown, the sensor SE1 senses presence orabsence of the tray T2 at a level 2 within the cassette C1. When thesensor SE1 senses the presence or absence of the tray T2 at the level 2,the camera CAM1 captures an image of an identification mark ID1 on aside surface SISU11 of the tray T1 at a level 1.

In some embodiments, an identification mark is attached to a top surfaceof a tray instead of a side surface of the tray. In various embodiments,an identification mark is attached to a bottom surface of a tray insteadof the top or side of the tray.

In several embodiments, an identification mark is imprinted on a surfaceof a tray. In various embodiments, an identification mark is imprintedon a tag that is attached to a surface of a tray.

As the door 124 moves vertically down, the sensor SE1 senses presence orabsence of the tray T2 and of the tray T3. Moreover, as the door 124moves vertically down, the camera CAM1 takes an image of anidentification mark ID2 attached to a side surface of the tray T2 and ofan identification mark ID3 attached to a side surface of the tray T3 ata level 3.

As shown, the camera CAM1 is angled with respect to the sensor SE1 toallow the camera CAM1 to capture an image of the identification mark ID1at the level 1 at a time the sensor SE1 senses presence or absence ofthe tray T2 at the level 2.

In various embodiments, the camera CAM1 forms an angle with respect tothe sensor SE1 to capture an image at a level that is above any numberof levels from a level at which the sensor SE1 detects. For example, thecamera CAM1 is angled with respect to the sensor SE1 to allow the cameraCAM1 to capture at image of the identification mark ID1 at the level 1at a time the sense SE1 senses presence or absence of the tray T3 at thelevel 3. As another example, the camera CAM2 forms an angle between zeroand eighty-nine degrees with respect to the sensor SE1.

The identification marks ID3 may be a numeric identification mark, e.g.,an identification mark 210 that includes numbers, or a barcode, e.g., abarcode 212, or a combination of a barcode and numbers, e.g., anidentification mark 214, or an EZ code, e.g., a two-dimensional code216, or an alphanumeric code, e.g., a code 218. Other types of barcodesinclude an Aztec symbol, a high capacity color barcode, a quick response(QR) code, a MaxiCode, a ShotCode, etc.

FIG. 6C is an isometric view of an embodiment of a portion 217 of theEFEM 156 (FIG. 4A) to illustrate a close-up of the cameras CAM1 and CAM2and sensors SE1 and SE2.

FIG. 6D is an isometric view of an embodiment of the load port side of aportion 220 of the EFEM 156 (FIG. 4A). The cassette C1 includes a topsupport SU11 that supports a tray. As shown, the cassette C1 ispositioned close to the opening O4 to facilitate unloading of a trayfrom the cassette C1 or loading of a tray to the cassette C1. In someembodiments, the cassette C1 is placed within a pre-determined distanceof a film 222 that surrounds the opening O4. The film 222 is made of aflexible material, e.g., polyethylene, nylon, synthetic material,thermoplastics, thermosetting polymers, a combination thereof, etc.

In various embodiments, the EFEM 156 excludes a film at an opening thatis formed by opening a door of the EFEM 156.

FIG. 7A is a top view of an embodiment of a portion 230 of the indexerside when the plates 144 and 146 are in the retracted position P1. Theportion 230 is used to illustrate a transfer of a tray between the EFEM156 and the indexer 104. The indexer 104 rests on the indexer base IB1.

The theta motor 112 (FIG. 1A) rotates the vertical drive column 114 sothat the edges E11 and E12 face the indexer 104 via the slot S1 on theindexer side of the EFEM 156. Also, the vertical drive motor drives thevertical drive column 114 to position the edges E11 and E12 at a levelof the slot S1. The driving plates 144 and 146 are driven by the endeffector drive motor 184 (FIG. 5A) to slide the top slider block 176(FIG. 5A) and the bottom slider block along the slide base 188 andanother slide located opposite to the slide base 188. The top and bottomslider blocks slide towards the indexer 104. The slides 120 and 122extend through the slot S1. The upper grip assembly 180 grips the trayT2 that is covered with a tray lid L2.

When the driving plates 144 and 146 move towards the indexer from theretracted position P1, the tray T2 and the tray lid L2 slide towards theindexer 104 via the slot S1 until the driving plates 144 and 146 reachthe extended position P2, which is shown in FIG. 7B. The tray T2 mayslide on top of another tray in the indexer 104. Also, the gripassemblies 180 and 182 (FIG. 5A) pass through the slot S1 when thedriving plates 144 and 146 move from the retracted position P1 to theextended position P2.

FIG. 7B is a top view of an embodiment of the portion 230 when theplates 144 and 146 are in the extended position P2. In the extendedposition P2, grip assemblies 180 and 182 (FIG. 5A) have extended throughthe slot S1 to reach the indexer 104. When the plates reach the extendedposition P2 from the retracted position P1, the tray T1 slides from theupper slide 120 to the indexer 104 to be placed on top of the tray lidL1 in the indexer 104 or on top of the base of the indexer module IM1.

Similarly, in some embodiments, the tray T2 is retrieved from theindexer 104 and placed in the EFEM 156. For example, the vertical drivecolumn 114 is driven by the vertical drive motor to change a level ofthe grip assemblies 180 and 182 (FIG. 5A) to obtain one or two traysfrom the indexer 104. The grip assemblies 180 and 182 grip trays frombetween the indexer supports IS11, IS12, IS13, and IS14. The endeffector drive motor 184 (FIG. 5A) drives the top slider block 176 andthe bottom slider block and the gripped trays slide from the indexer 104towards the EFEM 156 via the slot S1 to facilitate the driving plates144 and 146 to reach the retracted position P1 from the extendedposition P2. Also, the grip assemblies 180 and 182 pass via the slot S1when the top slider block 176 and the bottom slider block slide towardsthe EFEM 156. The gripped trays slide from the indexer 104 towards theslides 120 and 122 (FIG. 5A). For example, the gripped trays slide frombeing on top of another tray in the indexer 104 towards the slides 120and 122. The edges E11, E12, E21, and E22 facilitate reception of thegripped trays from the indexer 104 onto the slides 120 and 122. Thedriving plates 144 and 146 reach the retracted position P1 from theextended position P2.

FIG. 7C is an isometric view of an embodiment of a portion 240 of theindexer side to illustrate use of a reader 242 between the EFEM 156(FIG. 4A) and the indexer 104. The reader 242 is attached via aconnector 244 to the indexer 104. For example, the connector 244 isattached to the indexer module IM1 and the reader 242 is attached, viaan attachment mechanism to the connector 244.

When a tray is transferred between the indexer 104 and the EFEM 156,e.g., unloaded from the EFEM 156 to the indexer 104, loaded from theindexer 104 to the EFEM 156, etc., the reader 242 reads the informationidentifying the tray. The reader 242 sends the information to thecomputer system 152 (FIG. 3) to facilitate determination of a locationof the tray, e.g., whether the tray is in the indexer 104 or in the EFEM156.

As shown, a tray is to be loaded into the indexer 104 from the slides120 and 122.

FIG. 7D is an isometric view of an embodiment of a portion 250 of theindexer side to illustrate use of the reader 242 between the EFEM 156(FIG. 4A) and the indexer 104 and to illustrate the extended position P2of the driving plates 144 and 146 during loading a tray into the indexer104 or unloading a tray from the indexer 104. As shown, the top drivingplate 144 is in the position P2 and a tray is loaded into the indexer104.

In some embodiments, when the top driving plate 144 is in the positionP2, a tray is to be retrieved from the indexer 104.

FIG. 7E is a top isometric view of an embodiment of a portion 260 of theindexer side to illustrate use of the reader 242 between the EFEM 156(FIG. 4A) and the indexer 104.

FIG. 7F is a top isometric view of an embodiment of a portion 270 of theindexer side to illustrate use of the reader 242 between the EFEM 156(FIG. 4A) and the indexer 104 and to illustrate a position of thedriving plates 144 and 146 during loading a tray into the indexer 104 orunloading a tray from the indexer.

FIG. 7G is a side isometric view of an embodiment of a portion 280 ofthe indexer side to illustrate use of the reader 242 between the EFEM156 (FIG. 4A) and the indexer 104 and to illustrate a position of thedriving plates 144 and 146 before loading a tray into the indexer 104.

FIG. 7H is a side isometric view of an embodiment of a portion 290 ofthe indexer side to illustrate use of the reader 242 between the EFEM156 (FIG. 4A) and the indexer 104 and to illustrate a position of thedriving plates 144 and 146 during loading a tray into the indexer 104 orunloading a tray from the indexer 104.

FIG. 8A is a top view of an embodiment of a grip assembly 300 when thegrip assembly 300 is about to grip a tray or has released a tray. Thegrip assembly 300 is used for gripping a tray and transferring the traybetween the cassette 102 (FIG. 1A) and the indexer 104 (FIG. 1A). Thegrip assembly 300 is an example of the grip assembly 180 or the gripassembly 182 (FIG. 5A).

The grip assembly 300 is attached to a driving plate 302 via fastenersF1 and F2. The driving plate 302 is an example of the top driving plate144 or the bottom driving plate 146 (FIG. 5A). In some embodiments,another other number of fasteners are used to attach the grip assembly300 to the driving plate 302.

The grip assembly 300 includes grip body 304, a portion of which iscovered by a cover 306. For example, the cover 306 is attached to theportion via one or more screws, e.g., screws SC1, SC2, SC3, and SC4. Thegrip body 304 is attached to the driving plate 302 via the fasteners F1and F2.

In some embodiments, the portion of the grip body 304 is not covered byany cover.

The cover 306 covers a piston mechanism 308, which is attached to thegrip body 304. The piston mechanism 308 includes a piston housing 310and a piston 312 that slides in and out of the piston housing 310 tomove along a length “le” of the grip body 304.

The piston 312 is attached to a twist connector 314, which is connectedto an arm 316. The twist connector 314 is rotatably attached to the gripbody 304 via a pivot mechanism 317 and rotates with respect to the gripbody 304 via the pivot mechanism 317. For example, the pivot mechanism317 pivots with respect to the grip body 304 to rotate the twistconnector 314 with respect to the grip body 304.

The arm 316 is connected via multiple pivot mechanisms and a clamp to agrip clamp located within a grip mouth of the grip assembly 300. Thepivot mechanisms, the clamp, the grip clamp, and the grip mouth aredescribed below. The arm 316, the pivot mechanisms, the clamp, the gripclamp, and a portion of the grip body 304 including the grip mouth forma grip mechanism 318.

When the twist connector 314 is in a position Pos1, the grip clamp hasreleased or is about to grip a tray.

A fiber cable 320 is used to facilitate guidance of a light, e.g., anoptical beam, etc., generated by a light source and sensor within thegrip assembly 300 to a space between jaws of the grip mouth of the gripmechanism 318.

The piston housing 310 is covered by the cover 306 and is connected to ablock connector 319. The block connector 319 is connected via anattachment mechanism to the grip body 304.

FIG. 8B is a top view of an embodiment of the grip assembly 300 when thegrip assembly 300 grips a tray. When the piston 312 extends from thepiston housing 310 towards the grip mechanism 318 along the length le,the twist connector 314 pivots with respect to the grip body 304 andtwists to a position POS2 from the position POS1 (FIG. 8A).

In some embodiments, when the twist connector 314 is at the positionPOS2, the twist connector is substantially perpendicular to the lengthle. In these embodiments, when the twist connector 314 is at theposition POS1, the twist connector is angled and is not substantiallyperpendicular with respect to the length le.

The tray T1 is gripped when the twist connector 314 is at the positionPOS2.

FIG. 8C is a top view of an embodiment of the grip assembly 300 when thegrip assembly 300 misses gripping a tray. When the piston 312 extendswithin the piston housing 310 away towards the grip mechanism 318 alongthe length le, the twist connector 314 pivots with respect to the gripbody 304 and twists to a position POS3 from the position POS2 (FIG. 8B).

Similarly, the twist connector 314 changes from the position POS3 to theposition POS1. For example, the piston 312 retracts within the pistonhousing 310 to change a position of the twist connector 314 from theposition POS3 to the position POS1.

In some embodiments, when the twist connector 314 is at the positionPOS3, the twist connector is angled and is not substantiallyperpendicular with respect to the length le.

In various embodiments, the angle formed by the twist connector 314 inthe position POS3 with respect to the length le may be the same as thatof the angle formed when the twist connector 314 is in the position POS1except that the angle formed in the position POS1 is opposite to theangle formed when the twist connector 314 is in the position POS3. Inseveral embodiments, the angle formed by the twist connector 314 in theposition POS3 with respect to the length le may be different from theangled formed when the twist connector 314 is in the position POS1except that the angle formed in the position POS1 is opposite to theangle formed when the twist connector 314 is in the position POS3.

Gripping of the tray T1 is missed when the twist connector 314 is at theposition POS3.

FIG. 8D-1 is a side view of an embodiment of a portion 350 of the gripassembly 300 when the twist connector 314 is at the position POS1 togrip a tray or after a recent release of the tray. When the piston 312is extended to an extent EX1 from the piston housing 310 (FIG. 8A), thetwist connector 314 is at the position POS1. The twist connector 314 isattached via the arm 316 to a pivot mechanism 352. The pivot mechanism352 is attached to a clamp 354, which is attached to another pivotmechanism 356. Examples of a pivot mechanism include a rod, a bar, acylinder, etc. The pivot mechanism 356 is at an opposite end of theclamp 354 compared to the pivot mechanism 352.

A grip clamp 358 is attached to the pivot mechanism 356 and extends intoa grip mouth 360 of the grip body 304. In some embodiments, the gripclamp 358 is referred to herein as a gripper. The grip clamp 358 movesup and down within the grip mouth 360 with the rotation of the pivotmechanism 356. The grip mouth 360 is formed at an edge of the grip body304.

In some embodiments, the grip mouth 360 has a C shape or a nearly Cshape.

The piston 312 slides horizontally in an out of the piston housing 310(FIG. 8A) to change positions of the twist connector 314 between POS1,POS2, and POS3. When the twist connector 314 pivots using the pivotmechanism 317, the arm 316 moves in and out, e.g., extends and retracts,etc., horizontally to rotate the pivot mechanism 356 via forward andbackward movement of the clamp 354. As the pivot mechanism 356 rotates,the grip clamp 358 moves vertically up and down.

The fiber cable 320 facilitates formation of a sensor beam 362 betweentwo opposite jaws 364 and 366 of the grip mouth 360. The sensor beam 362is generated when the light source and sensor generates light that isguided into a beam by the fiber cable 320 towards the grip mouth 360. Atray hook H1 attached to the tray T1 is about to intercept the sensorbeam 362 or has just finished intercepting the sensor beam 362 when thetwist connector 314 is in the position POS1.

In various embodiments, the grip assembly 300 excludes the fiber cable320 and the light sensor and source.

In some embodiments, when the sensor beam 362 is intercepted by an edgeof a tray, e.g., by a tray hook, etc., a sensor within the grip body 304sends a signal to an encoder and decoder within the end effector drivemotor 184 (FIG. 5A). The encoder and decoder determines a horizontallocation of the grip mechanism 318 at which the sensor beam 362 isintercepted and sends a stop signal to the end effector drive motor 184(FIG. 5A). Upon receiving the stop signal, the end effector drive motor184 stops driving the grip assembly 300 via the driving plates 144 and146 (FIG. 5A). The stopping facilitates engagement of the tray hook H1with the grip clamp 358.

In some embodiments, the end effector drive motor 184 moves the gripassembly 300 at a faster speed until the sensor beam 362 is interceptedand slows and/or stops the movement after the sensor beam 362 isintercepted.

FIG. 8D-2 is another side view of an embodiment of the portion 350 ofthe grip assembly 300 when the twist connector 314 is at the positionPOS1 to grip a tray or after a recent release of the tray.

FIG. 8D-3 is a side view of an embodiment of the portion 350 of the gripassembly 300 when the twist connector 314 is at the position POS2 andhas gripped the tray T1. When the piston 312 has extended to an extentEX2 from the piston housing 310 (FIG. 3A), the twist connector 314 is atthe position POS2. In some embodiments, the extent EX2 is greater thanthe extent EX1 (FIG. 8D-2).

When the twist connector 314 is at the position POS2, the grip clamp 358grips, e.g., forms a hook connection, etc., with the tray hook H1 toengage the tray T1. As the twist connector 314 moves horizontally fromthe position POS1 to the position POS2, the grip clamp 358 movesvertically up to grip the tray hook H1. Also, the sensor beam 362 isintercepted by the tray hook H1. When the sensor beam 362 is interceptedby the tray hook H1, the sensor within the grip assembly 300 (FIG. 8A)senses that a tray is about to be gripped.

In some embodiments, the piston 312 retracts from the extent EX2 to theextend EX1 (FIG. 8D-1) to release a tray from the grip of the grip clamp358.

After the tray hook H1 engages with the grip clamp 358, the end effectordrive motor 184 operates to drive the plates 144 and 146 (FIG. 5A) bydriving the top slider block 176 and the bottom slider block along theslide base 188 (FIG. 5A) to retract the grip assembly 300 towards theslides 120 and 122. The tray T1 slides from the cassette 102 or theindexer 104 to the upper slide 120 or to the lower slide 122 as theplates 144 and 146 slide from the position P2 (FIG. 5B) to the positionP1 (FIG. 5A).

Similarly, as the piston 312 retracts from the extent EX2 to the extentEX1 (FIG. 8D-1), the twist connector 314 pivots with respect to thepivot mechanism 317 from the position POS2 to the position POS1. As thetwist connector 314 pivots from the position POS2 to the position POS1,the grip clamp 358 moves vertically down to release the tray hook H1 torelease the tray T1.

FIG. 8D-4 is a side view of an embodiment of the portion 350 of the gripassembly 300 when the twist connector 314 is at the position POS3 andhas missed gripping a tray. When the piston 312 has extended to anextent EX3 from the piston housing 310 (FIG. 3A), the twist connector314 is at the position POS3. In some embodiments, the extent EX3 isgreater than the extent EX2 (FIG. 8D-3).

When the twist connector 314 is at the position POS3, the grip clamp 358has missed gripping a tray hook to miss engaging a tray.

FIG. 8E is an isometric view of an embodiment of the portion 350 whenthe twist connector 314 is at the position POS1 and the grip assembly300 is about to or has just released the tray T1.

FIG. 8F is an isometric bottom view of an embodiment of the grip body304 when the grip assembly 300 has gripped the tray T1 via the tray hookH1. As shown, the tray T1 has a slot 305 that extends from an edge 307of the tray T1 to a bottom surface 309 of the tray T1 in a verticaldirection.

FIG. 8G is an isometric view of an embodiment of the portion 350 thathas gripped the tray T1.

FIG. 8H is another isometric view of an embodiment of the portion 350that is about to grip the tray T1 or has just released the tray T1.

FIG. 9A is a side view of an embodiment of the tray engine 108 thatincludes two grip assemblies 300 as examples of the upper and lower gripassemblies 180 and 182. The grip assemblies 180 and 182 have grippedtrays. As shown, the trays are gripped at alternate levels within thecassette 102. For example, a tray is gripped at a level LL1 by the lowergrip assembly 182 and another tray is gripped at a level LL3 by theupper grip assembly 182. A level LL2 lies between the levels LL1 andLL3.

Also, when the trays are gripped, the vertical column 114 is rotated bythe theta motor 112 to facilitate edges 1 and 2 of the grip assemblies180 and 182 to face the cassette 102.

FIG. 9B is an isometric view of an embodiment of the grip assemblies 180and 182 in a gripping position of gripping trays from the cassette 102.

FIG. 9C is a side view of an embodiment of portions of the gripassemblies 180 and 182 to illustrate gripping trays from the cassette102.

FIG. 9D is a top view of an embodiment of the tray engine 108 toillustrate the retracted position P1 of the driving plates 144 and 146.The driving plates are in the retracted position P1 before gripping atray from the cassette 102 or after gripping the tray T3 from thecassette 102.

FIG. 9E is a top view of an embodiment of the tray engine 108 toillustrate the extended position P2 of the driving plates 144 and 146.The driving plates are in the extended position P2 during gripping ofthe tray T1 from the cassette 102.

FIG. 9F is an isometric view of an embodiment of a portion of the gripassembly 300 (FIG. 8A).

In various embodiments, the grip assembly 300 includes sensors todetermine whether a tray is gripped or released.

FIG. 10A is a side view of an embodiment of a grip assembly 400 that isused to grip a tray. The grip assembly 400 is an example of the gripassembly 180 or the grip assembly 182 (FIG. 5A).

In some embodiments, the grip assembly 400 is used to retrieve a trayfrom the cassette 102 (FIG. 1A) or the indexer 104 (FIG. 1A) to theslides 120 and 122 (FIG. 1A). In various embodiments, the grip assembly400 is used to slide trays from the slides 120 and 122 to the cassette102 or the indexer 104.

The grip assembly 400 includes a grip body 402 that is attached to thedriving plate 302 via the fasteners F1 and F2 (see FIG. 10E).

A cover 404 is attached to a portion via an attachment mechanism, e.g.,screws SC1, SC2, SC3, and SC4, etc., of the grip body 402 to cover theportion of the grip body 402.

In some embodiments, the cover 404 is attached to the portion of thegrip body 402 via any number of screws.

In various embodiments, the portion of the grip body 402 is not coveredby any cover.

A portion of the grip body 402 includes a slot 406 on a top surface 412of the grip body 402. A slide tab 408 is fitted with a piston 410 andthe piston 410 slides in and out of the grip body 402 to slide on top ofthe surface 412.

The grip assembly 400 includes a grip mechanism 414, which includes theslide tab 406, a portion of the grip body 402 having the surface 412,and the slot 406.

FIG. 10B is a side view of an embodiment of the grip assembly 400 aboutto grip the tray T1. As the slider block 176 (FIG. 5A) slides along theslide base 188 (FIG. 5A), the driving plate 302 (FIG. 10E) slides withthe slider block 176 from the position P1 (FIG. 5A) to the position P2(FIG. 5A). The grip assembly 400 slides with the driving plate 302 toreach the tray T1 that may be within the cassette 102 (FIG. 1A) or theindexer 104 (FIG. 1A). The tray T1 has an edge 411 that forms a borderof the slot 305 (FIG. 8F) of the tray T1. The grip assembly 400 slidesuntil the edge 411 is received within the slot 406.

The slot 406 is formed between two horizontally extended portions 407and 409 of the grip body 402. The extended portion 407 has the topsurface 412.

FIG. 10C is a side view of an embodiment of the grip assembly 400 thathas gripped the tray T1. The slot 305 at the bottom surface 309 (FIG.8F) of the tray T1 comes in contact with the extended portion 409 toengage the extended portion 409. When the extended portion 409 hasengaged the slot 305 and the edge 411 of the tray T1 is received withinthe slot 406, the tray T1 is gripped by the grip assembly 400.

In various embodiments, the fiber cable 320 is implemented within thegrip assembly 400 in a similar manner as that of the grip assembly 300(FIG. 8A). Moreover, interception of the sensor beam 362 (FIG. 8A) isdetermined in a similar manner as that described above.

Also, in some embodiments, the end effector drive motor 184 (FIG. 4A)moves grip assembly 400 via the plates 144 and 146 (FIG. 5A) at a fasterspeed until the sensor beam 362 is intercepted and slows or stops thegrip assembly 400 after the sensor beam 362 is intercepted to facilitatereception of an edge of a tray into the slot 406.

In some embodiments, the terms grip and engage are used interchangeablyherein.

FIG. 10D is a side view of an embodiment of the grip assembly 400 inwhich the slide tab 408 extends over the tray lid L1 to lock the tray T1with the grip body 402. The piston 410 extends from a retracted positionthat is shown in FIGS. 10A thru 10C to an extended position along alength “len” (shown in FIG. 10E) of the grip body 402 to allow aprotruding portion 416 of the slide tab 408 to contact the tray lid L1to lock the tray T1. It should be noted that the tray T1 is engaged withthe extended portion 409 when the protruding portion 416 extends overthe tray lid L1 to lock the tray T1 with the grip body 402.

After the tray T1 is locked with the grip body 402, the end effectordrive motor operates to drive the plates 144 and 146 (FIG. 5A) bydriving the top slider block 176 and the bottom slider block along theslide base 188 (FIG. 5A) to retract the grip assembly 400 towards theslides 120 and 122 (FIG. 5A). The tray T1 slides from the cassette 102or the indexer 104 to the upper slide 120 or to the lower slide 122 asthe plates 144 and 146 slide from the position P2 (FIG. 5B) to theposition P1 (FIG. 5A).

FIG. 10E is a top view of an embodiment of the grip assembly 400. Thepiston 410 is connected in a sliding position to a piston housing 440.The piston housing 440 is covered by the cover 404 and is connected to ablock connector 442. The block connector 442 is connected via anattachment mechanism to the grip body 402. As shown, the slide tab 408is in a retracted position.

FIG. 10F is a top view of an embodiment of the grip assembly 400 whenthe extended portion 409 (FIG. 10B) of the grip body 402 has engaged thetray T1. As shown, when the extended portion 409 has engaged the trayT1, the piston 410 is in the retracted position and the slide tab 408has not locked the tray T1.

FIG. 10G is a top view of an embodiment of the grip assembly 400 whenthe extended portion 409 (FIG. 10B) of the grip body 402 has engaged thetray T1 and the slide tab 408 extends over the tray lid L1 to lock thetray T1.

FIG. 11A is a side view of an embodiment of a system 450 illustratinguse of the grip assembly 400 for engaging and locking the tray T1 in thecassette 102. As shown, the bottom surface 309 of the tray T1 is incontact with the top surface 412 (FIG. 10A) of the grip body 402.

FIG. 11B is an isometric view of an embodiment of the grip assembly 400as gripping tray from the cassette 102.

FIG. 11C is a side view of an embodiment of the tray engine 108 thatincludes two grip assemblies 400 as examples of the upper and lower gripassemblies 180 and 182 (FIG. 5A).

In some embodiments, the grip assemblies 180 and 182 are used to griptray lids instead of trays to remove tray lids from trays located withinthe cassette 102 or the indexer 104. In these embodiments, the gripassemblies 180 and 182 are used to place tray lids on trays locatedwithin the cassette 102 or the indexer 104.

FIG. 11D is an isometric view of an embodiment of the grip assembly 400.

In various embodiments, the grip assembly 400 includes sensors todetermine whether a tray is gripped or released.

FIG. 12 is an isometric view of an embodiment of a grip assembly 500that provides horizontal access to a tray. The grip assembly 500 is anexample of the upper grip assembly 180 or the lower grip assembly 182(FIG. 5A). A grip attachment 502 is attached to a front surface 503 ofthe tray T1. Gripping clamps 504 and 506 of the grip assembly 500 areattached to a grip base 508 via a grip connector 509. The grip base 508,the grip connector 509, and the gripping clamps 504 and 506 are parts ofthe grip assembly 500. The grip base 508 is attached to the drivingplate 302 (FIG. 8A).

In several embodiments, the gripping clamps 504 and 506 are C-shaped ornearly C-shaped.

In some embodiments, the grip connector 509 includes a slidingmechanism, e.g., rails, etc., that allow the gripping clamps 504 and 506to slide along the rails. In various embodiments, the grip connector 509includes pivot mechanisms and the gripping clamps 504 and 506 pivot withrespect to the pivot mechanisms.

With the extension of the driving plate 302 (FIG. 8A) from the positionP1 (FIG. 5A) to the position P2 (FIG. 5B), the grip assembly 500 extendswith the driving plate 302. The gripping clamps 504 and 506 pivot withrespect to the grip connector 509 to engage, e.g., form a hookconnection with, etc., the grip attachment 502 to grip the tray T1. Inembodiments in which slides are used to slide the gripping clamps 504and 506, the gripping clamps 504 and 506 slide along the connector 509to engage the grip attachment 502.

It should be noted that when a pitch between two trays at consecutivelevels within the cassette 102 or the indexer 104 is low, the grippingclamps 504 and 506 to slide or pivot horizontally facilitates use of thelow pitch. For example, the gripping clamps 504 and 506 do not use spacebetween a level LVL 1 of the tray lid L1 and a level LVL 2 of the topsurface 515 of the grip attachment 502. As another example, the grippingclamps 504 and 506 do not use space between a level LVL3 of a bottomsurface of the grip attachment 502 and a level LVL4 of a bottom of thetray T1.

FIG. 13 is an isometric view of an embodiment of a grip assembly 550that provides horizontal access to a tray. The grip assembly 550 is anexample of the upper grip assembly 180 or the lower grip assembly 182(FIG. 5A). Grip attachments 552 and 554 are attached to the frontsurface 503 of the tray T1. Gripping clamps 556 and 558 of the gripassembly 550 are attached to the grip base 508 via a grip connector 560.The grip base 508, the grip connector 560, and the gripping clamps 556and 558 are parts of the grip assembly 550. The grip base 508 isattached to the driving plate 302 (FIG. 8A).

In some embodiments, the grip connector 560 includes a slidingmechanism, e.g., rails, etc., that allow the gripping clamps 556 and 558to slide along the rails. In various embodiments, the grip connector 560includes pivot mechanisms and the gripping clamps 556 and 558 pivot withrespect to the pivot mechanisms.

In several embodiments, the gripping clamps 556 and 558 are C-shaped ornearly C-shaped. In various embodiments, the grip attachments 552 and554 are L-shaped or nearly L-shaped.

With the extension of the driving plate 302 from the position P1 to theposition P2, the grip assembly 550 extends with the driving plate 302.The gripping clamps 556 and 558 pivot with respect to the grip connector560 to engage, e.g., form a hook connection with, etc., thecorresponding grip attachments 552 and 554 to grip the tray T1. Inembodiments in which slides are used to slide the gripping clamps 556and 558, the gripping clamps 556 and 558 slide along the connector 560to engage the grip attachments 552 and 554.

It should be noted that gripping clamps 556 and 558 provide the sameadvantages as that of the gripping clamps 504 and 506 (FIG. 12).

FIG. 14A is an isometric view of an embodiment of a grip assembly 600.The grip assembly 600 is fixed to a driving plate 603 via an attachmentmechanism. The grip assembly 600 includes a grip body 602 that isattached to the driving plate 603 via an attachment mechanism. Thedriving plate 603 is an example of the top driving plate 144 or thebottom driving plate 146 (FIG. 5A).

A cover 604 of the grip assembly 600 covers a portion of the grip body602. For example, the cover 604 covers a piston mechanism 606. Thepiston mechanism 606 includes a piston housing 608 and a piston 610 thatis slidable within the piston housing 608.

The piston housing 608 is attached to the grip body 602 via a blockconnector 612. The block connector 612 is attached to the grip body 602via an attachment mechanism.

The piston 610 is fixedly attached to a slider 614 that is in a position“Post1”. The slider 614 is retracted in the position Post1 when thepiston 610 is retracted.

The slider 614 is attached via a translation mechanism Tsln1 to a leftarm 616 and is attached via a translation mechanism Tsln2 to a right arm618. In some embodiments, the arms 616 and 618 are referred to herein asa gripper. The translation mechanism Tsln1 translates within a throughhole HL1 of the slider 614 and the translation mechanism Tsln2translates within a through hole HL2 of the slider 614. As shown, eachtranslation mechanism Tsln1 and Tsln2 is at an end Ent of the slider614.

A portion of the left arm 616 lays within a slide block 620 and aportion of the right arm 618 lays within a slide block 622. A leftextension 624 extends from an inner surface of the left arm 616 and aright extension 626, shown below in FIG. 14F, extends from an innersurface of the right arm 618.

As shown, the left extension 624 is a part of the left arm 616 and theright extension 626 is a part of the right arm 618. In variousembodiments, instead of being integral to the corresponding arms 616 and618, the left extension 624 is attached to the left arm 616 and theright extension 626 is attached to the right arm 618.

A portion of the grip body 602, the slider 614, the translationmechanisms Tsln1 and Tsln2, the slide blocks 620 and 622, the arms 616and 618, and the extensions 624 and 626 are parts of a grip mechanism630, which is a part of the grip assembly 600.

A tray Tr1 that is about to be gripped by the grip assembly 600 or justreleased by the grip assembly 600 includes through holes Th1 and Th2.The through holes Th1 and Th2 are located at opposite edges of the trayTr1.

FIG. 14B is an isometric view of an embodiment of the grip assembly 600when the grip assembly 600 has gripped the tray Tr1. When the piston 610extends from the piston housing 608 and is not in the retractedposition, the translation mechanism Tsln1 translates within the throughhole H1 from the end Ent to a location closer to an opposite end En2 ofthe slider 614 and the translation mechanism Tsln2 translates within thethrough hole H2 from the end Ent to a location closer to an opposite endEn2 of the slider 614.

The translations of the translation mechanisms Tsln1 and Tsln2 withinthe corresponding through holes HL1 and HL2 from the ends Ent tolocations closer to opposite ends En2 of the slider 614 contracts thearms 616 and 618 to extend the extensions 624 and 626 (FIGS. 14A and14F) within the corresponding through holes Th1 and Th2 (FIG. 14A) ofthe tray Tr1. As the arms 616 and 618 contract towards each other tomove in a horizontal direction, the arms 616 and 618 slide within thecorresponding slide blocks 620 and 622.

When the extensions 624 and 626 extend via the corresponding throughholes Th1 and Th2 of the tray Tr1, the tray Tr1 is gripped by the gripassembly 600.

Similarly, in an opposing motion, the piston 610 is retracted into thepiston housing 608. When the piston 610 retracts into the piston housing608, the slider 614 retracts from the position Post2 to the positionPost1. As the slider 614 retracts from the position Post2 to theposition Post1, the translation mechanisms Tsln1 and Tsln2 slide withinthe corresponding through holes HL1 and HL2 from the ends En2 towardsthe opposite ends Ent of the slider 614.

As the translation mechanisms Tsln1 and Tsln2 slide within thecorresponding through holes HL1 and HL2 towards the ends En1, the arms616 and 618 extend outward in a horizontal direction to extend theextensions 624 and 626 outside of the corresponding through holes Th1and Th2 to release the tray Tr1 from grip of the grip assembly 600. Asthe arms 616 and 618 extend outward away from each other, the arms 616and 618 slide within the slide blocks 620 and 622.

It should be noted that the grip assembly 600 grips the tray Tr1 byusing a horizontal motion of the arms 616 and 618 towards and away fromthe tray Tr1. The horizontal motion of the arms 616 and 618 to griptrays may facilitate a lower pitch between levels of the cassette 102 orthe indexer 104 compared to vertical motion of arms of a grip assemblyto grip trays.

FIG. 14C is an isometric view of an embodiment of the grip assembly 600in a position Post3. The piston 610 extends further out from the pistonhousing 608 to extend the slider 614 from the position Post2 to theposition Post3. As the slider 614 translates, e.g., slides on the gripbody 602, from the position Post2 to the Post3, the translationmechanisms Tsln1 and Tsln2 move to the ends En2. In some embodiments,the move to the ends En2 may indicate a miss of gripping a tray Tr1.

FIG. 14D is an isometric view of an embodiment of the right arm 618 ofthe grip assembly 600. The right arm 618 is about to grip the tray Tr1or has just released the tray Tr1.

FIG. 14E is an isometric view of an embodiment of the right arm 618 ofthe grip assembly 600. The right arm 618 is about to grip the tray Tr1or has just released the tray Tr1. As shown, the right extension 626 isabout to extend within the through hole Th2 or has just retracted fromthe through hole Th2.

FIG. 14F is a bottom isometric view of an embodiment of the grip body602 and the arms 616 and 618. As shown, the grip body 602 includes agrip tab 640 that supports the tray Tr1 when the tray Tr1 slides fromthe cassette 102 or the indexer 104 (FIG. 1) to the sorter 106 (FIG. 1)or from the sorter 106 to the cassette 102 or the indexer 104. The arms616 and 618 are about to grip the tray Tr1 or has just released the trayTr1.

FIG. 14G is a bottom isometric view of an embodiment of the grip body602 and the arms 616 and 618. The arms 616 and 618 grip the tray Tr1when the right extension 626 extends through the through hole Th2 andthe left extension 624 extends through the through hole Th1.

Although some of the above-described embodiments describe trays coveredwith tray lids, in some embodiments, a tray is used without a tray lid.For example, a tray is not covered with a tray lid.

It is noted that although some of the above-described embodimentsinclude the tray engine 102 within the sorter 106 (FIG. 1A) or the EFEM156, in some embodiments, the tray engine 102 is located within a toolthat is described with reference to FIG. 3.

Moreover, in various embodiments, instead of using informationidentifying a tray, information identifying a tray lid may be used. Forexample, a tray lid has a tag or imprints that identifies the tray andthe tag is captured by a camera or read by an RFID reader. In variousembodiments, both a tray and a tray lid have tags that identify the trayand the tray lid, and information on the tags is captured with a cameraor with an RFID reader.

Also, in some embodiments, the sorter 106 has storage devices to buffertrays and/or tray lids as the trays and/or tray lids are transferredbetween the cassette 102 and the indexer 104.

While the present disclosure in terms of several embodiments, it will beappreciated that those skilled in the art upon reading the precedingspecifications and studying the drawings will realize variousalterations, additions, permutations and equivalents thereof. Therefore,it is intended that the present disclosure includes all suchalterations, additions, permutations, and equivalents as fall within thetrue spirit and scope of the invention.

The invention claimed is:
 1. An end effector for transferring trays,comprising: an end effector base having a length; a first slide baselocated within the end effector base; a first driving plate slidablewith respect to the end effector base via the first slide base; a firstslide having a first plurality of arms attached to the end effectorbase, wherein the first slide is attached to the end effector base via aslide support to be supported by the slide support, wherein each of thefirst plurality of arms has a support surface on top of which a firsttray, when present, is supported, wherein the first driving plate isconfigured to slide the first tray on top of the support surfaces of thefirst plurality of arms and between and along lengths of the firstplurality of arms of the first slide, wherein the first plurality ofarms face each other and extend along the length of the end effectorbase; and a second slide having a second plurality of arms attached tothe end effector base, wherein the second slide is located over thefirst slide, wherein the second slide is attached to the end effectorbase via the slide support to be supported by the slide support.
 2. Theend effector of claim 1, wherein each of the second plurality of armshas a support surface on top of which a second tray, when present, issupported.
 3. The end effector of claim 2, further comprising: a secondslide base; a second driving plate slidable with respect to the endeffector base via the second slide base, wherein the second drivingplate is configured to slide the second tray between and along lengthsof the second plurality of arms of the second slide, wherein the secondplurality of arms face each other and extend along the length of the endeffector base.
 4. The end effector of claim 3, further comprising: aslider block slidably attached to the end effector base; a connectorblock attached to the slider block; a grip assembly configured to gripthe second tray when present, wherein the second driving plate isattached to the connector block and the grip assembly to move the gripassembly between a retracted position and an extended position to enablea movement of the second tray, when present, in a linear direction. 5.The end effector of claim 3, further including a grip assembly includinga gripper configured to grip the second tray when present, wherein thesecond driving plate is coupled to the grip assembly to enable movementof the second tray gripped by the gripper in a linear direction.
 6. Theend effector of claim 3, further comprising a grip assembly attached tothe second driving plate, wherein the grip assembly includes a gripbody, a first pivot mechanism located over the grip body, a twistconnector attached to the first pivot mechanism, and an arm attached tothe twist connector.
 7. The end effector of claim 6, wherein the gripassembly includes a second pivot mechanism and a grip clamp, wherein thearm is connected via the second pivot mechanism to the grip clamp forclamping the second tray when present.
 8. The end effector of claim 1,wherein each of the first plurality of arms has an edge, wherein theedge has an upper surface located opposite to the support surface forenabling the first tray to slice between the upper surface and thesupport surface.
 9. The end effector of claim 1, further comprising aslider block located below the first driving plate, wherein the firstslide base includes a rail, wherein the slider block is configured toslide with respect to the rail.
 10. The end effector of claim 1, furthercomprising: a slider block slidably attached to the end effector base; aconnector block attached to the slider block; a grip assembly configuredto grip the first tray when present, wherein the first driving plate isattached to the connector block and the grip assembly to move the gripassembly between a retracted position and an extended position to enablea movement of the first tray, when present, in a linear direction. 11.The end effector of claim 1, further comprising: a grip assembly coupledto the first driving plate, wherein the first driving plate and the gripassembly are configured to move in a linear direction over the supportsurfaces of the first plurality of arms.
 12. The end effector of claim1, further including a grip assembly including a gripper configured togrip the first tray when present, wherein the first driving plate iscoupled to the grip assembly to enable movement of the first traygripped by the gripper in a linear direction.
 13. The end effector ofclaim 1, further comprising a grip assembly attached to the firstdriving plate, wherein the grip assembly includes a grip body, a firstpivot mechanism located over the grip body, a twist connector attachedto the pivot mechanism, and an arm attached to the twist connector. 14.The end effector of claim 13, wherein the grip assembly includes asecond pivot mechanism and a grip clamp, wherein the arm is connectedvia the second pivot mechanism to the grip clamp for clamping the firsttray when present.